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VLSI Physical Design  ›  Ch 6. PD Tool Inputs & Outputs

Double Vias and Antenna Violations

  • A Search and Repair run done later to resolve DRC may cause antenna violations.
  • Turning on antenna checking rolls double vias back to single vias, which reduces antenna violations.

KEY Double vias themselves are usually safe; later DRC repair can cause antennas, and antenna checking rolls them back.

Filler Cell Insertion

  • For good yield, the chip density needs to be uniform, but some placement sites on certain rows remain empty.
  • The tool accepts two lists of filler cells - with metal and without metal.
  • Cells without metal are inserted without DRC checking, so you must provide cells that have no metal.
  • Cells with metal are inserted only where they do not cause a DRC violation.
  • Filler cells are inserted in the specified order, and inserting from larger to smaller is recommended.
  • By default, filler insertion honours hard and soft placement blockages.

KEY Filler cells fill empty placement sites to keep density uniform for yield, honouring blockages and DRC.

Metal Fill Insertion

  • Non-uniform metal density causes manufacturing problems, especially during chemical mechanical polishing (CMP).
  • Extraction in the FILL view does not account for metal fill.
  • Extraction in the CELL view does not correctly account for fill.
  • Timing analysis does not consider metal fill.

KEY Metal fill keeps metal density uniform for CMP, but extraction and timing do not fully account for it.